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Yamazaki, H.; Ikehashi, T.; Saito, T.; Ogawa, E.; Masunaga, T.; Ohguro, T.; Sugizaki, Y.; Shibata, H.
2010 IEEE MTT-S International Microwave SymposiumConference Proceeding
This paper presents an RF MEMS tunable capacitor that achieves excellent power-handling property with relatively low actuation voltage. The tunable capacitor consists of two fixed MIM (Metal-Insulator-Metal) capacitors and two MEMS capacitor elements, all connected in series. This quadruple series capacitor (QSC) structure enables to reduce the actuation voltage without sacrificing the power-handling capability, since the MIM capacitor reduces the RF voltage amplitude applied to the MEMS capacitors. Measured result demonstrates +36dBm hot-switching at 85C with 21V pull-in voltage.
