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Hunger, H.-J.; Löbig, G.
Thin solid films, 11/1997, Letnik: 310, Številka: 1Journal Article
A new method for the preparation of metal boride layers on steel and nickel alloys by plasma activation of Ar-H 2-BF 3 atmospheres is presented. Thermochemical calculations show the basic role of the atomic hydrogen generated by the plasma in this process. It is also demonstrated that the use of BF 3 avoids the corrosion problems associated with BCl 3 which have been the main hindrance to the development of a technical process up to now. The plasma activation of Ar-H 2-BF 3 atmospheres gives the basis for development of such a process.
