The AlCrMoNiTi and AlCrMoZrTi nitride films were prepared by reactive radio-frequency (RF) magnetron sputtering at various N2-to-Ar flow ratios (RN). The influence of RN on the structure and properties of these films was investigated. The two alloy films presented an amorphous structure, while a simple face-centered-cubic (FCC) solid-solution structure was observed in the nitride films prepared under different RN. As the RN increased, the clusters, defects and film thickness decreased, which resulted in a dense columnar structure and low surface roughness. Peak hardness of 19.6GPa for AlCrMoZrTi nitride films and 15.4GPa for AlCrMoNiTi nitride films were attained at RN=1.0 respectively. At RN=0.5, the friction coefficients of AlCrMoNiTi and AlCrMoZrTi nitride films were respectively 0.15 and 0.13. Moreover, the AlCrMoZrTi nitride films did not undergo wear-out after 1200s friction experiment. Therefore, The AlCrMoZrTi nitride films exhibited better mechanical properties than that of AlCrMoNiTi nitride films, which may be related to the fact that the solid-solution strengthening effect of Zr was greater than that of Ni. •Two films were prepared by RF sputtering at various N2/Ar flow ratio (RN).•Two films had an amorphous and FCC phase at low and high RN, respectively.•(AlCrMoZrTi)Nx had the lowest friction coefficient of 0.13 among these films.•The mechanical properties of (AlCrMoZrTi)Nx outperform the (AlCrMoNiTi)Nx.•Solid-solution strengthening effect of Zr element stronger than Ni element.