•Determination of the differential cross-sections for the measured 3He+3H nuclear reaction, which has three decaying channels.•First cross-section measurements with 3He beam energy up to 3.3 MeV for two decay channels 3H(3He,d)4He and 3H(3He,p)5He.•Measured angular dependence for the two decay channels.•Utilization of special ΔE–E telescope detector to distinguish between the different decay channels.•Establishment of 3He nuclear reaction ion beam technique for non-destructive tritium depth profiling in solids. The differential cross-section for the 3He+3H nuclear reaction was measured in a thin tritiated PdTi film that was deposited on a Si wafer. The sample was loaded with 3H2 gas at a temperature of 300 °C and at a pressure of 1.8 bar. The total activity of the sample, measured by the liquid scintillation technique, was found to be 395 MBq. Two peaks were observed in the spectrum of the thick Si detector, corresponding to the 3H(3He,d)4He and 3H(3He,p)5He reaction channels. The differential cross-section was determined for the energy range of the 3He beam from 0.6 to 3.4 MeV, at three scattering angles of 125, 135 and 155°. The differential cross-section for the first channel remained almost constant within the measured energy range, while the cross-section for the second channel increased with energy. In both cases, the cross-sections reached their maximum value at the lowest scattering angle measured. The differential cross-sections were verified using a thick solid tritiated tungsten target. For assessing the tritium depth profile, only the reaction channel 3H(3He,d)4He can be utilized.