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Krueger, S P; Neubauer, H; Bartels, M; Kalbfleisch, S; Giewekemeyer, K; Wilbrandt, P J; Sprung, M; Salditt, T
Journal of synchrotron radiation, 03/2012, Letnik: 19, Številka: 2Journal Article
The propagation of hard X-ray synchrotron beams in waveguides with guiding layer diameters in the 9-35nm thickness range has been studied. The planar waveguide structures consist of an optimized two-component cladding. The presented fabrication method is suitable for short and leak-proof waveguide slices with lengths (along the optical axis) in the sub-500 mu m range, adapted for optimized transmission at photon energies of 11.5-18keV. A detailed comparison between finite-difference simulations of waveguide optics and the experimental results is presented, concerning transmission, divergence of the waveguide exit beam, as well as the angular acceptance. In a second step, two crossed waveguides have been used to create a quasi-point source for propagation-based X-ray imaging at the new nano-focus endstation of the P10 coherence beamline at Petra III. By inverting the measured Fraunhofer diffraction pattern by an iterative error-reduction algorithm, a two-dimensional focus of 10nm 10nm is obtained. Finally, holographic imaging of a lithographic test structure based on this optical system is demonstrated.
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JCR | SNIP | JCR | SNIP | JCR | SNIP | JCR | SNIP |
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in: SICRIS
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