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  • Monte Carlo simulations of sputtering yield for deposition-relevant target materials : plenary lecture
    Mahne, Nastja ; Čekada, Miha ; Panjan, Matjaž, 1980-
    Source: (Str. 26)
    Type of material - conference contribution ; adult, serious
    Publish date - 2022
    Language - english
    COBISS.SI-ID - 108885763