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Electron microscopy study of NiCr thin films
Irmančnik-Belič, Lidija ; Remškar, Maja, 1960- ; Požun, Karol
A few nm thick NiCr layer forms the capacitance humidity sensor electrodes. The electrodes must have the adequate electric resistance, low mechanical tensions, proper elasticity coefficient in order ...to prevent the corruption of the NiCr - dielectric layer joint when the dielectric is saturated by the water vapour. The upper electrode must be permeable for the water vapour in order to permit the water vapour to diffuse into the dielectric. The sufficient permeability of the NiCr film is obtained by sputtering under the incidence angle 0-75°. The sputtering angle is defined as the angle between the normal of the substrate and the normal of the sputtering source. The results of detailed NiCr layer analysis by the TEM, AFM, SEM, EDX and AES are presented. The thin NiCr layer is nonhomogenous (texture, electric resistance and morphology) due to the different vapour pressures of the Ni and Cr during the sputtering process. The NiCr thin film sputtered under 0° incidence angle is cracky, while the layer sputteres under 75° incidence angle has the columnar structure that is probably able to compensate inner mechanical tensions.
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