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  • Ferroelectric ▫$LiTaO_3$▫ thin film annealed in the electric field
    Kandušer, Alenka ...
    ▫$LiTaO_3$▫ thin film have been obtained by RF-magnetron sputtering from monocrystalline target. The films have been deposited on (111) silicon and platinum, all without substrate heating. The ... amorphous films were subsequently annealed in the electric field. The morphology, structure and composition of the films were investigated by means of XRD, SEM and AES spectroscopies. The influence of the annealing treatment in the electric field on the morphology and structure of films is significant. The films grown in this fashion are preferentially oriented with the c-axis perpendicular to the surface of substrates while the films grown without applied electric field exhibited usual random orientation.
    Source: Proceedings (Str. 361-367)
    Type of material - conference contribution ; adult, serious
    Publish date - 1992
    Language - english
    COBISS.SI-ID - 190634

source: Proceedings (Str. 361-367)
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