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CMOS testno vezje z Al/TiN/▫$TiSi_2$▫-Si metalizacijsko strukturoPanjan, Peter, 1957- ...V prispevku je opisana metoda priprave in karakterizacije metalizacijske strukture Al/TiN/▫$TiSi_2$▫-Si, ki smo jo dobili z nanosom TiN/Ti ali ▫$TiN_{0.7}$▫ plasti na silicij in vakuumskim ... pregrevanjem na 1023 K. Titan silicidne plasti so imele specifično upornost med 18 in 25 ▫$\mu$▫Ohmcm. Strukturo in sestavo smo analizirali z rentgenom za tanke plasti, transmisijsko elektronsko mikroskopijo in Augerjevim spektrometrom. Izdelano je bilo CMOS testno vezje, na katerem smo izmerili kontatktno upornost in tok pušanja na majhnih ▫$n^+p^-$▫ diodah.Source: Zbornik referatov XXV. jugoslovanskega simpozija o elektronskih sestavnih delih in materialih - SD 89 (Str. 149-155)Type of material - conference contribution ; adult, seriousPublish date - 1989Language - slovenianCOBISS.SI-ID - 190890
Author
Panjan, Peter, 1957- |
Godec, Matjaž |
Navinšek, Boris |
Žabkar, Anton, 1949-1997 |
Kraševec, Viktor |
Maček, Marijan |
Marinković, Velibor |
Mandrino, Djordje |
Zalar, Anton |
Fišer, Jožko
Topics
integrirana vezja |
metalizacija |
kontakti |
titan |
silicij |
Augerjeva elektronska spektroskopija |
tanke plasti |
transmisijska elektronska mikroskopija |
integrated circuit |
metallization |
contacts |
titanium |
silicon |
Auger electron spectoscopy |
thin films |
transmission electrical microscopy
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Database name | Field | Year |
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Links to authors' personal bibliographies | Links to information on researchers in the SICRIS system |
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Panjan, Peter, 1957- | 09090 |
Navinšek, Boris | 00085 |
Žabkar, Anton, 1949-1997 | 03252 |
Kraševec, Viktor | 01098 |
Marinković, Velibor | 01097 |
Zalar, Anton | 01741 |
Fišer, Jožko | 15601 |
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