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Industrial scale 10 mu m W coating of CFC tiles for ITER-like Wall Project at JET
Ruset, Cristian ...
As a result of the R&D phase of the ITER-like Wall Project, combined magnetronsputtering and ion implantation (CMSII) technique was selected for 10mu m W coating of approx. 1000 CFC tiles for the new ...JET first wall. This technique involves simultaneous magnetron sputtering and high energy ion bombardment. A high voltage pulse discharge is superposed over the magnetron deposition and by this way positive ions are accelerated, bombarding initiallythe substrate and then the coating itself during its growth. Based onthis method, industrial equipment with a deposition chamber of Phi 800 mm x 750 mm and 24 magnetrons was designed, manufactured and commissioned. The coating productivity is about 1 m(2)žweek. Tungsten coatings with a thickness of up to 17 mu m and multilayer structures Mo/W/Mo/W with a thickness of similar to 25 mu m were produced and successfully tested at 100 pulses of 16.5MW/m(2) for 1.5 s
Source: Proceeding (Iss. 7-11, Vol. 84, 2009, str. 1662-1665)
source: Proceeding (Iss. 7-11, Vol. 84, 2009, str. 1662-1665)
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