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  • Growth of amorphous SiC film on Si by means of ion beam induced mixing
    Barna, Árpád ...
    Source: Applied Surface Science. - ISSN 0169-4332 (Vol. 263, 2012, str. 367-362)
    Type of material - article, component part
    Publish date - 2012
    Language - english
    COBISS.SI-ID - 26326567
    DOI