Sputtering by Particle Bombardment III : Characteristics of Sputtered Particles, Technical Applications

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Sputtering by Particle Bombardment III : Characteristics of Sputtered Particles, Technical Applications

Behrisch, R. ...

Type of material - book

Publication and manufacture - Berlin [etc.] : Springer-Verlag, 1991

Language - english

ISBN - 3-540-53428-8

COBISS.SI-ID - 2662183

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Library/institution	City	Acronym	For loan	Other holdings
Jožef Stefan Institute, Ljubljana	Ljubljana	IJS	outside loan 1 cop.

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Year	JCR	SNIP	JCR	SNIP	JCR	SNIP	JCR	SNIP

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