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  • Influence of non-Gaussian roughness on sputter depth profiles
    Liu, Y., fizik ...
    Source: Applied Surface Science. - ISSN 0169-4332 (Vol. 276, 2013, str. 447-453)
    Type of material - article, component part
    Publish date - 2013
    Language - english
    COBISS.SI-ID - 27406631
    DOI