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  • Plasma potential of a moving ionization zone in DC magnetron sputtering
    Panjan, Matjaž, 1980- ; Anders, André
    Source: Journal of applied physics. - ISSN 0021-8979 (Vol. 121, no. 6, 2017, str. 063302-1- 063302-17)
    Type of material - article, component part
    Publish date - 2017
    Language - english
    COBISS.SI-ID - 30248743
    DOI

source: Journal of applied physics. - ISSN 0021-8979 (Vol. 121, no. 6, 2017, str. 063302-1- 063302-17)
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