Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry : semiconductor measurement technology

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Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry : semiconductor measurement technology

Bullis, W... Murray ; Perkowitz, S... ; Seiler, D... G.

Type of material - book

Publication and manufacture - Washington : National Institute of Standards and Technology, 1995

Language - english

COBISS.SI-ID - 3614247

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Bullis, W... Murray | Perkowitz, S... | Seiler, D... G.

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Library/institution	City	Acronym	For loan	Other holdings
Jožef Stefan Institute, Ljubljana	Ljubljana	IJS	outside loan 1 cop.

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Year	Impact factor		Edition		Category		Classification
Year	JCR	SNIP	JCR	SNIP	JCR	SNIP	JCR	SNIP

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