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  • The influence of hard-baking temperature applied for SU8 sensor layer on the sensitivity of capacitive chemical sensor
    Klanjšek Gunde, Marta ...
    Source: Applied physics. A, Materials science & processing. - ISSN 0947-8396 (Vol. 95, no. 3, 2009, str. 673-680)
    Type of material - article, component part
    Publish date - 2009
    Language - english
    COBISS.SI-ID - 4060442
    DOI