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  • Movable target assembly for diode sputtering system
    Stone, Connie A. ; Rožaj Brvar, Alenka ; Davis, Robert Foster
    Source: Review of scientific instruments. - ISSN 0034-6748 (Vol. 53, no. 11, 1982, str. 1754-1756)
    Type of material - article, component part ; adult, serious
    Publish date - 1982
    Language - english
    COBISS.SI-ID - 4169242

source: Review of scientific instruments. - ISSN 0034-6748 (Vol. 53, no. 11, 1982, str. 1754-1756)
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