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Quantification of AES depth profiles by MRI model
Kovač, Janez, 1965- ; Zalar, Anton ; Praček, Borut
The main effects that contribute to the interface broadening in sputter depth profiles of polycrystalline metallic multilayer structures were studied by comparison between mesured and simulated AES ...depth profiles. An algorithm based on the so-called mixing-roughness-information depths (MRI) model was used to simulate AES depth profiles of Ni/Cr multilayer structures with different roughness of the initial surfaces. The simulated depth profiles were compared with the measurements performed at the same conditions on the Ni/Cr multilayer sample and on the same sample covered either with a smooth amorphous Ta[sub]2O[sub]5 layer or a rough cystalline Al layer with an initial surface roughness of about 1 nm and the 21,5 nm, respectively. Comparison of simulated and measured depth profiles enabled us to separate and estimate different contributions to the interface broadening as well as their dependance on the sputter depth. We found that the roughness was a dominant factor related to the depth resolution with respect to the information depth and atomic mixing contribution. The values of roughness introduced in the simulation algorithm coincide well with the values measured by AFM at the initial surface and after depth profiling. The results showed the capability of the simulation procedure based on the MRI model to separate and evaluate different contributions to the depht resolution.
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