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Characterization of multilayer PACVD TiN/Ti(B-N)/TiB2 coatings for hot-worked tool steels using electron spectroscopy techniques = Karakterizacija večplastne PACVD TiN/Ti(B-N)/TiB2 prevleke za orodna jekla za delo v vročem s tehnikami elektronske spektroskopijeJenko, Monika, metalurginja ...Multilayer Ti(B-N) layers have been sandwiched between a TiN coating on treated AISI H11 steel and an outermost TiB[sub]2 coating. The films were deposited with plasma-assisted chemical vapour ... deposition (PACVD) and have been characterized using electron spectroscopy techniques. The thickness of the total coating is 1.6 [mu]m and comprised 21 layers. Earlier studies of such coatings using X-ray diffraction (XRD), energy dispersive spectroscopy (EDS), and wavelength dispersive spectroscopy (WDS) suffer from their relatively large analysis depths. In this work, Field-emission Auger electron spectroscopy (FE-AES) was used to examine the composition of the multilayered films since it has a smaller analysis depth. AES line-scans across cross-sectioned samples and AES depth profiling were used and are shown to be well suited for characterizing these multilayered coatings. These results are compared with combined Field-emission scanning electron microscopy (FE-SEM) and wavelength dispersive spectroscopy (WDS) measurements of the cross-sectioned samples.Source: Materiali in tehnologije = Materials and technology. - ISSN 1580-2949 (Letn. 42, št. 6, 2008, str. 251-255)Type of material - article, component partPublish date - 2008Language - englishCOBISS.SI-ID - 699562
Author
Jenko, Monika, metalurginja |
Mandrino, Djordje, 1964-2021 |
Godec, Matjaž, 1961- |
Grant, John T. |
Leskovšek, Vojteh
Topics
plasma-assisted chemical vapour deposition (PACVD) |
hard TiN/Ti(B-N) coating |
AISI H11 tool steel |
Auger electron spectroscopy (AES) |
Field-emission SEM |
wavelength-dispersive spectroscopy (WDS) |
s plazmo podprt nanos preko kemijske parne faze (PACVD) |
trde TiN/Ti(B-N) prevleke |
AISI H11 orodno jeklo |
Augerjeva elektronska spektroskopija (AES) vrstično elektronska mikroskopija sFEG izvorom elektronov (FE_SEM) |
valovno disperzijska spektroskopija (WDS)
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Database name | Field | Year |
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Links to authors' personal bibliographies | Links to information on researchers in the SICRIS system |
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Jenko, Monika, metalurginja | 05675 |
Mandrino, Djordje, 1964-2021 | 08850 |
Godec, Matjaž, 1961- | 10842 |
Grant, John T. | ![]() |
Leskovšek, Vojteh | 07642 |
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