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Improved static gas-sorption method for characterizing non-evaporable getters = Izboljšana statična sorpcijska metoda za karakterizacijo nenaparljivih getrov
Erjavec, Bojan, 1950-2023 ; Šetina, Janez
Non-evaporable getters (NEGs) based on Ti- and Zr-alloys, which exhibit large sorption capacity for H[sub]2 and simultaneously high pumping speed for chemically active gases (H[sub]{2}O, CO, N[sub]2, ...O[sub]2, CO[sub]2), are used for maintaining ultrahigh vacuum conditions in small static vacuum systems (hermetically encapsulated devices). Porous thick-film NEGs are incorporated in Dewar flasks, plasma displays, field-emission displays, image intensifiers, photomultipliers, micro-electro-mechanical systems (MEMS), etc. Due to miniaturization of some of the mentioned devices, such as channel photomultipliers (CPMs) and MEMS, there exists a need for incorporating structured thin-film NEGs produced by vacuum sputtering. The main characteristics of the improved static gas-sorption method, developed at IMT, are constant gas flow and variable pressure above the getter surface. It is essential that inert vacuum gauges such as the capacitance diaphragm gauge (CDG) and the spinning rotor gauge (SRG) are used for adjusting and in situ calibrating gas flow by the rate of pressure rise method as well as the same SRG for measuring pressure above the getter surface. For the static gas-sorption method, it is characteristic that during the sorption test non-getterable gases (noble gases and CH[sub]4) may accumulate in the test chamber. Therefore, the test gas flow is few times interrupted in order to measure the change in background pressure. There are several advantages of the improved static gas-sorption method over the widely used standard dynamic gas-sorption method, since total pressure measurements are performed using the inert CDG and SRG in static mode without poisoning NEGs under test. The improved static method enables discrete monitoring the background pressure rise due to accumulation of inert gases throughout the sorption test and, at the end of test, analysis of non-getterable gas composition by the gas-burst method using RGA. In addition, the composition of residual atmosphere during the activation process is controlled using RGA in dynamic mode.
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