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Micrometer-sized specimen preparation based on ion slicing technique
Wurster, Stefan ...
The ion slicing technique has been well known for producing samples for transmission electron microscopy (TEM) investigations. It will be shown that this method can also be used for producing ...different types of samples for micro-mechanical experiments. The capability of manufacturing thin freestanding lamellae with a width of some micrometers and subsequently cantilevers and tensile testing specimens on the micrometer-scale using the focused ion beam (FIB) technique will be demonstrated.
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