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Surface compositional changes induced by ion beam sputtering of Fe-Si-Al alloy
Šetina, Barbara ; Jenko, Monika, metalurginja
Ion beam sputtering is a versatile tool for inducing changes of the surface structure and morphology. Depending on the substrate and ion beam conditions, various morphlogical features can be observed ...on the surfaces of metals; such as etch pits, smooth surfaces, periodic ripple-like or faceted structures, or rough affine surfaces. Experimental work on characterization of the so-induced surfaces, but polycrystalline substrates have the advantage of including many crystal orientations in a single experimental run. It is also possible to characterize the orientation of each individual grain by Electron Backscatter Diffraction (EBSD) technique, thus gaining a complete set of orientations and the patterns formed. The surface also undergoes certain changes in the surface elemental composition, which is mainly due to two effects: preferential sputtering in a multi-component system and ion-beam induced segregation. In the scope of performed experimental work, we tried to correlate the ion-beam induced segregation with crystal orientation and the starting composition. To this effect, we used two sets of experimental Fe-2%Si1%Al alloys, which were similar in compositon but for the amount of surface active elements (P, S, Se) which are usually associated with segregation and surface reconstruction at higher temperatures. The specimens were etched by Ar+ ions and the surface compositional changes were investigated by means of Auger electron spectroscopy and X-ray photoelectron spectros[!]opy. The results show ion-beam induced segregation of S, which forms a chemical bond with Fe in the surface layers. Some preferential sputtering was also observed.
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