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  • The influence of target composition and thermal treatment on sputtered Al thin films on Si and SiO2 substrates
    Resnik, Drago ...
    Source: Microelectronic engineering. - ISSN 0167-9317 (Vol. 96, Aug. 2012, str. 29-35)
    Type of material - article, component part ; adult, serious
    Publish date - 2012
    Language - english
    COBISS.SI-ID - 9074772