Proceedings of the 7th International Conference on Reactive Plasmas, 28th Symposium on Plasma Processing, 63rd Gaseous Electronics Conference, Paris, 4-8 October 2010

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Proceedings of the 7th International Conference on Reactive Plasmas, 28th Symposium on Plasma Processing, 63rd Gaseous Electronics Conference, Paris, 4-8 October 2010

International Conference of Reactive Plasmas (7 ; 2010 ; Paris); Symposium on Plasma Processing (28 ; 2010 ; Paris); Gaseous Electronics Conference (63 ; 2011 ; paris)

Type of material - proceedings of conference contributions

Publication and manufacture - Tokyo : Physical Society of Japan, 2011

Language - english

ISBN - 978-4-86348-101-5

COBISS.SI-ID - 24120359

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Author
International Conference of Reactive Plasmas | Symposium on Plasma Processing | Gaseous Electronics Conference

Other authors
Hari, M. | Graham, W.G.

Collection
Japanese journal of applied physics

Topics
fizika plazme

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Links to authors' personal bibliographies	Links to information on researchers in the SICRIS system
Hari, M.
Graham, W.G.

Source: Personal bibliographies and: SICRIS

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