Central Technological Library of the University of Ljubljana (CTK)
13.
Accuracy of Penning gauge measurements in UHV
Erjavec, Bojan
An enlarged Penning gauge comprising Cu cathode plates and a long SS anode cell of 24 mm inner diameter has been designed on the basis of the appendage sputter-ion pump with a nominal pumping speed ...of 2 l/s. If applying an external magnetic field of about 1600 Gauss while running the gauge in an atmosphere of ▫$N_2$▫ at a constant high voltage of 3,5 kV, then this gauge exhibited a sensitivity of almost 10 A/mbar, a continous linear response down to ▫$10^{-11} mbar$▫, and a relatively low static pumping speed of a few tenth l/s which depends on the saturation of the cathode plates. Although the seresults seemed to be very promising, it turned out that the use of this gauge is very questionable when measuring pressure in baked SS vacuum chambers, in which the residual atmosphere consists mostly of ▫$H_2$▫. This is beacuse if running the gauge in an atmosphere of ▫$H_2$▫, then it exhibits a very low sensitivity as well as its response in non-linear and discontinous. These characteristics were thoroughly examined on a gauge comparison system equipped with an extractor gauge, which was every time calibrated against a spinning rotor gauge, and are presented in this work.
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