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MEMS/NEMS handbook : handbook techniques and applicationsType of material - reviewPublication and manufacture - New York : Springer, cop. 2006Language - englishISBN - 0-387-24520-0COBISS.SI-ID - 27539973
Other authors
Leondes, Cornelius Thomas
Topics
Microelectromechanical systems |
Design and construction |
Nanotechnology |
elektrotehnika |
elektromehanski sistemi |
mikro sistemi |
nano tehnologije |
MEMS - Micro-Electro-Mechanical Systems |
NEMS - Nanoelectromechanical systems |
načrtovanje |
dinamične simulacije |
mikromehanski vibracijski žiroskop |
MEFS - Micro-Electro-Fluidic System |
mikro elektro-fluidni sistemi |
elektrostatične analize |
hitri mikro rotorji |
ultrazvočni pretvorniki |
proizvodne tehnike |
tehnologije vezij |
integrirana vezja |
razvoj prototipov |
mikro obdelave |
tehnologije vbrizgavanja |
injekcijsko vbrizgavanje |
pulzni laserji |
akustična mikroskopija |
senzorji |
aktivatorji |
mikročrpalke |
medicinske aplikacije |
MOEMS - Micro-Opto-Electro-Mechanical System |
pregledno delo
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Leondes, Cornelius Thomas |
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