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Determination of atomic oxygen density with a nickel catalytic probeŠorli, Iztok ; Ročak, RudolfSource: Journal of vacuum science & technology. A, Vacuum, surfaces, and films. - ISSN 0734-2101 (Vol. 18, no. 2, 2000, str. 338-342)Type of material - article, component part ; adult, seriousPublish date - 2000Language - englishCOBISS.SI-ID - 1828180
Author
Šorli, Iztok |
Ročak, Rudolf
Topics
nikljeve katalitične sonde |
RF kisikova plazma |
površinske reakcije |
koeficient površinskih rekombinacij |
globina prodiranja plazme |
nickel catalytic probe |
RF oxygen plasma |
surface reactions |
surface recombination coefficient |
plasma penetration depth
source: Journal of vacuum science & technology. A, Vacuum, surfaces, and films. - ISSN 0734-2101 (Vol. 18, no. 2, 2000, str. 338-342)
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Database name | Field | Year |
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Šorli, Iztok | 01718 |
Ročak, Rudolf | 05647 |
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