Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry : semiconductor measurement technology

Jožef Stefan Institute, Lj. (IJS)

Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry : semiconductor measurement technology

Bullis, W... Murray ; Perkowitz, S... ; Seiler, D... G.

Type of material - book

Publication and manufacture - Washington : National Institute of Standards and Technology, 1995

Language - english

COBISS.SI-ID - 3614247

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Bullis, W... Murray | Perkowitz, S... | Seiler, D... G.

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Jožef Stefan Institute, Lj.	available - outside loan, loan period: 1 months

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960/SP-400-98 IN: 009638859	available - outside loan, loan period: 1 months

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