(UL)
  • Radiofrequency induced plasma in large-scale plasma reactor = Radiofrekvenčno inducirana plazma v reaktorju velikih dimenzij
    Zaplotnik, Rok, 1981- ; Vesel, Alenka
    In this contribution we describe the characteristics of an electrical discharge in rarified gas created by dual-excitation coil. By using two parallel and overlapping excitation coils we can achieve ... a better transfer of the electromagnetic power from the radiofrequency (RF) generator to gaseous plasma. Dual-excitation coil is connected via a matching unit and a high frequency cable to the RF generator. Such special assembly (coupling of plasma with RF generator) has several advantages in comparison with normally used set-up. These advantages are the following: power transfer to plasma is increased, plasma is more homogeneous, the voltage necessary for generating plasma is lower, and many side-effects which are due to capacitive coupling of the plasma system are reduced.
    Source: Materiali in tehnologije = Materials and technology. - ISSN 1580-2949 (Letn. 45, št. 3, 2011, str. 227-231)
    Type of material - article, component part
    Publish date - 2011
    Language - english
    COBISS.SI-ID - 859306

    Link(s):

    http://www.imt.si/Revija/
    Digitalna knjižnica Slovenije - dLib.si

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