(UL)
  • Mikroobdelava silicija. Del 1
    Resnik, Drago
    This paper present an overview of techniques and fields involved in advanced micromachining of silicon. As the market demands new and sophisticated sensorsand actuators in a various fields of ... nowadays life, the micromachining as a tool in a constant progress, sometimes even ahead of manufactures needs. As a supplement to microelectronics it is capable to offer new solutions in area of micromechanical systems.
    Source: Vakuumist : glasilo Društva za vakuumsko tehniko Slovenije. - ISSN 0351-9716 (Let. 17, št. 4, 1997, str. 4-7)
    Type of material - article, component part
    Publish date - 1997
    Language - slovenian
    COBISS.SI-ID - 984148

    Link(s):

    Digitalna knjižnica Slovenije - dLib.si

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