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  • Dynamic characterization of microcantilevers with a shock wave excitation method under high temperature
    She, Dongsheng ...
    Aiming at the dynamic characteristics of silicon microcantilevers under a high-temperature environment, a shock wave excitation method was proposed, and a dynamic testing system with high-temperature ... loading unit for MEMS microstructures was established. In the system, the shock wave generated by electrical discharging was used to excite the testing microcantilever. The vibration response signals were acquired by laser Doppler vibrometer system. A T-shaped microcantilever and a microcantilever with uniform rectangular crossing section were fabricated and tested under the high-temperature environment ranging from 299 K to 773 K. Their temperature coefficients of natural frequency were obtained. The results show that for both two microcantilevers, the temperature coefficients of the natural frequency is very close to each other, which is only decided by the temperature coefficient of the elastic modulus and the linear thermal expansion coefficients.
    Vir: Strojniški vestnik = Journal of mechanical engineering. - ISSN 0039-2480 (Vol. 62, no. 9, Sep. 2016, str. 534-542, SI 88)
    Vrsta gradiva - članek, sestavni del
    Leto - 2016
    Jezik - angleški
    COBISS.SI-ID - 14808091

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    Digitalna knjižnica Slovenije - dLib.si
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