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  • Characteristics of a cold-cathode magnetron gauge designed on the basis of the small size sputter-ion pump
    Erjavec, Bojan, 1950-2023
    We have investigated an enlarged cold-cathode magnetron gauge based on the construction of a small size sputter-ion pump similar to that of the VARIAN 2 l/s sputter-ion pump. A discharge cell ... consists of a SS anode cylinder of 29 mm length and 24 mm inner diameter, and of Cu cathode plates mechanically and lelectrically connected with a 33 mm long SS rod of 2.5 mm diameter. In order to assure insulation currents below 10-12 A and enable measurements of very low discharge currents, the ceramic-to-metal HV feedthrough was replaced by a glass-to-metal one and the gauge body was electrically insulated from a CF connection flange through a glass-to-metal tubing seal. Main gauge characteristics such as (non)linearity of discahrge current vs pressure, discontinuities, relative sensitivities and pumping speeds for different gases as well as starting times were tested on a UHV gauge comparision system equipped with an extractor gauge and a spinning-rotor gauge. While varying the magnetic field density between 2.5 and 7.5 kV, we have realizd that the optimum operating parameters can be achieved if performing gauge calibrations - besides ▫$N_2 - also H_2 and He as test gases. Both gases exibit low ionization efficiencies and, therefore, for a normal gauge operation within wider pressure ranges, the ionization of their gas molecules has to be maintained by electrons of the optimum average enery.$▫
    Vir: Abstract book (Str. 407)
    Vrsta gradiva - prispevek na konferenci
    Leto - 1998
    Jezik - angleški
    COBISS.SI-ID - 19917317

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