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Reactions on catalytic probe surface during oxygen plasma treatment of polyether sulphone = Reakcije na površini katalitične sonde med plazemsko obdelavo polieter sulfonaMozetič, Miran, 1961-Experiments on the behavior of a nickel catalytic probe during activation of the surface of polyether sulphone in oxygen plasma are described. The temperature of the probe mounted 30 cm apart from ... inductively coupled RF oxygen plasma was measured for the case of empty dischaarge vessel and the case a sample with the dimensions of 8 cm x 1.2 cm x 0.4 cm was mounted in the middle of the discharge coil. It was found that both the maximum temperature and the first time derivative of the probe was much higher in the case of loaded discharge vessel than in the case of empty vessel. Both effects were described in terms of a higher probability for recombination of radicals such as CO on the probe surface than the recombination of neutral oxygen atoms.Vir: Informacije MIDEM : časopis za mikroelektroniko, elektronske sestavne dele in materiale = časopis za mikroelektroniku, elektronske sastavne dijelove i materijale = journal of microelectronics, electronic components and materials. - ISSN 0352-9045 (Let. 28, št. 3, september 1998, str. 175-179)Vrsta gradiva - članek, sestavni delLeto - 1998Jezik - angleškiCOBISS.SI-ID - 29922
Avtor
Mozetič, Miran, 1961-
Teme
sonde katalitične |
sonde katalitične nikljeve |
reakcije površinske |
obdelava s plazmo |
plazma kisikova |
polieter sulfon |
aktiviranje površine |
jedkanje plazemsko |
jedkanje suho plazemsko |
RF razelektritve radiofrekvenčne |
T-t karakteristike temperatura-čas |
catalytic probes |
nickel catalytic probes |
surface reactions |
plasma treatment |
oxygen plasma |
polyether sulphone |
surface activation |
plasma etching |
plasma dry etching |
RadioFrequency discharges |
T-t temperature-time characteristics
Vnos na polico
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Mozetič, Miran, 1961- | 10429 |
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