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  • Nanašanje tankih plasti s pulznim laserjem = Pulsed laser deposition of thin films
    Kek-Merl, Darja ; Panjan, Peter, 1957-
    High-power laser pulses can be used to vaporize s small area of the target. Generated cloud of the target material is then deposited onto the substrates. Laser radiation passing through the vapour ... cloud can also ionize a high percentage of the vapour. The most common laser type is the excimer laser with wavelength from 151-131 nm depending on the selected gas mixture (ArF-193nm, KrF-248nm, XeCl-308nm) or solid Nd:YAG lasers (266-1064nm). Lasers operate in pulses of energy between 0,1 to 1 J per pulse, duration timeis between 5 and 45 ns and commonly used repetition rates of 1 to 100 Hz. This techniques id ideal for the deposition of complex, multicomponent materials like high-temperature superconductors, ferroelectric and ferromagnetic materials.
    Vir: Vakuumist : glasilo Društva za vakuumsko tehniko Slovenije. - ISSN 0351-9716 (Letn. 21, št. 2, jun. 2001, str. 4-7)
    Vrsta gradiva - članek, sestavni del
    Leto - 2001
    Jezik - slovenski
    COBISS.SI-ID - 16109095

    Povezava(-e):

    Digitalna knjižnica Slovenije - dLib.si

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