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  • The characterization of polymer thin films grown by plasma polymerization
    Grant, John T. ...
    Plasma-enhanced chemical vapor deposition (PECVD) has been used to groww homo- polymerized films, co-polymerized films, and multi-layered films on a variety of substrates. The use of polymers as ... linear optical materials has growing, and organic materials offer several advantages over inorganic materials. These advantages include processability and cost. Optical polymers have refractive indices in a narrow range between 1.4 and 1.6 and for multi-layer interference films the thickness needs to be in the range of 75-100 nm. In this work, benzene and octafluorocyclobutane (OFCB) have been used as precursor materials and are reacted either downstream from the plasma or, in some cases with OFCB, in the plasma zone itself. Rates of deposition and refractive indices were measured and this information was used to design and fabricate photonic structures. The films were characterized using scanning electron microscopy (SEM), Fourier transform infrared spectroscopy (FTIR), variable-angle spectroscopic ellipsometry (VASE), and X-ray photoelectron spectroscopy (XPS/ESCA).
    Vir: Materiali in tehnologije = Materials and technology. - ISSN 1580-2949 (Letn. 38, št. 1/2, jan.-apr. 2004, str. 3-8)
    Vrsta gradiva - članek, sestavni del
    Leto - 2004
    Jezik - angleški
    COBISS.SI-ID - 339114

    Povezava(-e):

    Digitalna knjižnica Slovenije - dLib.si

vir: Materiali in tehnologije = Materials and technology. - ISSN 1580-2949 (Letn. 38, št. 1/2, jan.-apr. 2004, str. 3-8)

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