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  • Characterization of extremely weakly ionized hydrogen plasma with a double Langmuir probe = Karakterizacija šibko ionizirane vodikove plazme z dvojno Langmuirjevo sondo
    Mozetič, Miran, 1961-
    Basic parameters of hydrogen plasma created in a large discharge chamber were determined using a double Langmuir probe. Plasma was created in a Pyrex cylinder with the diameter of 25 cm and the ... height of 80 cm by an antenna connected to a RF generator operating at the frequency of 27.12 MHz and the power of about 200 W. The antenna was a copper coil of 4 turns. The discharge chamber was pumped with an oil diffusion pump with the nominal pumping speed of 600 L/s backed by a two slage rotary pump with the pumping speed of 4.4 x 10[sup]{-3} m[sup]3 s[sup]{-1}. The ultimate pressure of about 2 x 10[sup]{-3} Pa was obtained in the vacuum system after pumping for few hours. A dobule Langmuir probe was galvanic separated from the mains and placed into the centre of the discharge chamber. The probe was made from 2 tungsten rods with a diameter of 1.2 mm and separated for 2 cm. The length of un-insulated part of the rods was 17.5 mm. Plasma parameters were measured at different pressures between 0.4 and 7.2 Pa. The electron temperature reached the maximumof about kT[sub]e = 3.5 eV at the pressure of 1 Pa. The plasma density was slowly decreasing with increasing pressure and was of the order of 10[sup]{15} m[sup]{-3}, and the Debve length was rather constant at about 2 x 10[sup]{-4} m. The results were explaned by characteristics of an electrode less RF discharge in the E mode.
    Vir: Materiali in tehnologije = Materials and technology. - ISSN 1580-2949 (Letn. 45, št. 5, sep.-okt. 2011, str. 457-462)
    Vrsta gradiva - članek, sestavni del
    Leto - 2011
    Jezik - angleški
    COBISS.SI-ID - 881322

    Povezava(-e):

    Digitalna knjižnica Slovenije - dLib.si

vir: Materiali in tehnologije = Materials and technology. - ISSN 1580-2949 (Letn. 45, št. 5, sep.-okt. 2011, str. 457-462)

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