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Faculty of Electrical Engineering, Lj. (FERLJ)
  • Characterization of TEOS thin film depositions on PECVD reactors
    Iliescu, Ciprian ...
    Source: Conference 2014, proceedings (Str. 127-131)
    Type of material - conference contribution ; adult, serious
    Publish date - 2014
    Language - english
    COBISS.SI-ID - 10808148