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13.
Evaluation of magnesium and calcium oxide state in Auger electron spectroscopy depth profilings
Mandrino, Djordje ; Nolan, D.
It is frequently of interest, expecially in applied research, to be able not only to perform concentration profile studies of thin layers but also to determine oxide states of individual constituent ...elements. Auger Electron Spectroscopy (AES) and expecially X-ray Photoelectron Spectroscopy (XPS) are usually used for this, as in XPS influence of chemical state on energy shifts is well researched with databases of shifts in peak positions for different compounds readily available. Sometimes AES is preferred since it can provide highly localised measurement with measurement areas down to tens of nm, collateral benefit being shorter total sputtering time. Problem is that chemical state information is less readily available than in XPS since in AES influence of chemical state on energy shifts is less pronounced than in XPS. There are, however, several cases of large shifts of up to several eV between elemental (metallic) state and different compounds. So, kinetic energy of 1185.5 eV corresponds to Mg KLL in elemental Mg, but ~1180 eV to oxidized Mg. For Ca LMM these values are 298.2 eV for elemental and 292.5 eV for oxidized Ca. It was also attemped to use additional features, beyond peak position, observed in the AES spectra, i.e. to use Linear Least Squares Fitting (LLSF) procedure to fit Mg KLL and Ca LMM peak shapes with linear combinations of standard elemental and standard oxide peaks thus correlating Mg KLL and Ca LMM peak shapes to the chemical state of the corresponding element. A similar approach had been already tried with some success with Fe MNN and Cr MNN from oxide layer on stainless steel and recently with Al KLL and Yn LMM from 2 different commercial Al-Yn alloy thin layers. Chemical state information derived from AES via LLSF was compared to the one derived from kinetic energy shifts.
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