Mechanical considerations in the design of high-precision surface micromachined devices

(UL)

Mechanical considerations in the design of high-precision surface micromachined devices

Greek, Staffan

Type of material - dissertation ; adult, serious

Publication and manufacture - Uppsala : Acta Universitatis Upsaliensis : [distributor Uppsala University Library], 1998

Language - english

ISBN - 91-554-4343-5

COBISS.SI-ID - 105835520

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Comprehensive summaries of Uppsala dissertations from the Faculty of Science and Technology

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National and University Library, Ljubljana	DS 443590/409 dislocirano skladišče Leskoškova	available - reading room

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