Dielectric barrier discharge plasma deoxidation of copper surfaces in an Ar/SiH [sub] 4 atmosphere

(UL)

Dielectric barrier discharge plasma deoxidation of copper surfaces in an ▫$Ar/SiH_2$▫ atmosphere

Udachin, Viktor ...

Source: Plasma chemistry and plasma processing. - ISSN 0272-4324 (Vol. 42, iss. 5, 2022, str. 1169-1186)

Type of material - article, component part

Publish date - 2022

Language - english

COBISS.SI-ID - 113111043

Link(s):
https://link.springer.com/content/pdf/10.1007/s11090-022-10268-w.pdf
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Udachin, Viktor | Wegewitz, L. | Dahle, Sebastian | Maus-Friedrichs, Wolfgang

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source: Plasma chemistry and plasma processing. - ISSN 0272-4324 (Vol. 42, iss. 5, 2022, str. 1169-1186)

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Year	Impact factor		Edition		Category		Classification
Year	JCR	SNIP	JCR	SNIP	JCR	SNIP	JCR	SNIP

Links to authors' personal bibliographies	Links to information on researchers in the SICRIS system
Udachin, Viktor
Wegewitz, L.
Dahle, Sebastian	51819
Maus-Friedrichs, Wolfgang

Source: Personal bibliographies and: SICRIS

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