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Energy and mass spectroscopy of ions and neutrals in cold plasma = Energijsko ločljiva masna spektroskopija ioniziranih in nevtralnih delcev v hladni plazmiMaček, Marijan ; Čekada, MihaSource: Informacije MIDEM : časopis za mikroelektroniko, elektronske sestavne dele in materiale = časopis za mikroelektroniku, elektronske sastavne dijelove i materijale = journal of microelectronics, electronic components and materials. - ISSN 0352-9045 (Letn. 38, št. 4, dec. 2008, str. 277-282)Type of material - article, component part ; adult, seriousPublish date - 2008Language - englishCOBISS.SI-ID - 7103572
Author
Maček, Marijan |
Čekada, Miha
Topics
energijsko ločljiva spektroskopija plazme |
ionsko nanašanje |
TiC |
TiN |
TiCN |
polymer |
PES |
PET |
PPS |
PS |
PP |
PA6 |
PTFE |
cellulose |
oxygen |
plasma |
functionalization |
surface activation |
surface modification |
XPS
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Database name | Field | Year |
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Links to authors' personal bibliographies | Links to information on researchers in the SICRIS system |
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Maček, Marijan | 03494 |
Čekada, Miha | 18271 |
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