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  • Fabrication and characterization of Si/PZT membrane actuators
    Resnik, Drago ...
    Source: Proceedings (Str. 291-296)
    Type of material - conference contribution ; adult, serious
    Publish date - 2010
    Language - english
    COBISS.SI-ID - 7929428

source: Proceedings (Str. 291-296)

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