The effects of plasma treatment of polyimide substrates on the texture and grain size distribution of aluminum thin films were studied. Oxygen-argon plasma treatment increased the average grain size ...and enhanced the (111) film texture. For short oxygen-argon plasma treatment times, the deposited Al films showed a (111) texture with a bimodal grain structure and even a {111}<112¯> type in-plane texture. The preferential nucleation and grain growth of (111) grains are discussed in terms of the interface energy anisotropy.
Ni-Pt alloy thin films have been successfully synthesized and characterized; the films were prepared by the supercritical fluid chemical deposition (SFCD) technique from Ni(hfac)
3H
O and Pt(hfac)
...precursors by hydrogen reduction. The results indicated that the deposition rate of the Ni-Pt alloy thin films decreased with increasing Ni content and gradually increased as the precursor concentration was increased. The film peaks determined by X-ray diffraction shifted to lower diffraction angles with decreasing Ni content. The deposited films were single-phase polycrystalline Ni-Pt solid solution and it exhibited smooth, continuous, and uniform distribution on the substrate for all elemental compositions as determined by scanning electron microscopy and scanning transmission electron microscopy analyses. In the X-ray photoelectron spectroscopy (XPS) analysis, the intensity of the Pt 4f peaks of the films decreased as the Ni content increased, and vice versa for the Ni 2p peak intensities. Furthermore, based on the depth profiles determined by XPS, there was no evidence of atomic diffusion between Pt and Ni, which indicated alloy formation in the film. Therefore, Ni-Pt alloy films deposited by the SFCD technique can be used as a suitable model for catalytic reactions due to their high activity and good stability for various reactions.
•We characterized polarization of scattering from arbitrary and gratinglike one-dimensional surface with macroscopic roughness.•Polarization analysis for diffraction scatterings were carried out.•It ...was found that diffraction scattering from gratinglike macrorough surface do not contributes to the change of polarization.
For macroscopically rough surface with roughness much greater than wavelength of probe light, scatter from the surface can be explained to some extent as the specular reflection by the local facet. When surfaces possess gratinglike one dimensional patterns diffraction is also the reason of scatter. In this paper, we have characterized the polarization signature of the diffraction scattering by measuring Stokes parameters and polarization degree of scattered light by four samples with different surface patterns and roughness. Through comparison of polarization signatures of scattering from arbitrary and gratinglike one dimensional surface, it was found that the diffraction does not significantly affect the change of polarization state of scattering. The facet model is still available to some extent for polarization behavior of diffraction scatter by macroscopic rough surface.
To extract true optical properties of samples in a chamber with entrance and exit optical windows, oftentimes the windows were approximated as simple retarders where the retardation was small and ...premeasured under a given condition. The proposed method allows to cope with large birefringent effect of chamber windows thanks to its capability of extracting ellipsometric parameters (Δ, Ψ) of isotropic samples as well as measuring birefringent parameters (δ, θ) of each window separately and simultaneously. This method is, however, not valid for anisotropic samples. Ex situ results and extracted ellipsometric parameters results from in situ measurements of a silicon substrate and a SiO2 film thermally grown on the silicon substrate exhibited excellent agreement and provided significance of this method.
We have developed a flow-type reaction system that enables independent control of each deposition parameter at a constant value. Here we studied the deposition kinetics and narrow-gap-filling of ...copper thin film in supercritical carbon dioxide fluids using hexafluoroacetylacetonatecopper (Cu(hfac)
2) as a precursor. From the temperature dependence of the growth rate, the activation energy for Cu growth was determined at
0.45
±
0.09
eV. The dependences of the growth rate on the H
2 and Cu(hfac)
2 concentrations were studied, and an apparent rate equation was obtained. The gap-filling property was found to improve as H
2 concentration increases. The crystallographic texture of the obtained film was also studied, and (1
1
1) preferential films were obtained when the H
2 concentration was high.
In semiconductor and optics fields, some devices are constructed with layered systems including two or three individual layers. Measurement of polarization properties of the individual components of ...these layered systems is often desired. In this paper, we present methods allowing the simultaneous extraction of the polarization parameters of the individual components by analyzing spectroscopic Mueller matrices (measured at two wavelengths). We have studied both retarder-retarder and retarder-polarizer-retarder systems. The validities of the methods were successfully tested using both simulations and real polarization systems.
The diameter of cylindrical openings is conventionally measured with the mechanical and contact method. In this paper, we propose a contactless optical approach to measure dimensions of inner profile ...by a disk beam probe. The measurement is carried out illuminating the inner cylindrical opening with a light sheet generated by the disk beam probe, acquiring the light-section image of the object with an image sensor through a widefield lens, then numerically extracting the diameter. During measurement, the probe is aligned inside the openings with high freedom, which causes the optical section to manifest a variety of ellipses besides a circle accordingly. The measurement method copes with extracting the diameter of openings from various ellipse optical sections. The high freedom of probe alignment allows optical diameter measurement to be flexible and simple. The dimensions of cylindrical openings of manufactured parts were practically measured with the disk beam probe, and the results were confirmed with those measured with the vernier caliper.
This paper demonstrates zinc oxide (ZnO) film formation by using supercritical fluid chemical deposition and the application of the ZnO films in improving the adhesion of Cu/glass stacks. ...Bis(2-methoxy-6-methyl-3,5-heptanedionate)zinc(II) was used as a precursor, and the deposition was carried out at different oxygen contents and temperatures. When oxygen content was high and/or deposition temperature was high, white polycrystalline ZnO films were deposited; otherwise, the films were brown and had a higher carbon content. XPS analyses revealed that the white ZnO films had less carbon contamination. A significant improvement in the adhesion of the Cu/glass stacks was observed when the fabricated ZnO film was inserted between Cu and glass.
Microporous silicon has been formed by anodization of p-type silicon. The pores with diameter less than 2nm were filled with copper by using supercritical carbon dioxide fluid. The copper-filled ...layers were investigated with the field emission scanning electron microscopy, X-ray diffractometry, and energy-dispersive X-ray spectroscopy. Structural characterizations indicated that copper was continuously deposited into porous silicon down to a depth of about 0.5 mu m. Electrical measurement confirmed this result. Copper-deposited layers exhibited much improved current density-potential curves.
PDF
