The Quality Control (QC) of pre-production strip sensors for the Inner Tracker (ITk) of the ATLAS Inner Detector upgrade has finished, and the collaboration has embarked on the QC test programme for ...production sensors. This programme will last more than 3 years and comprises the evaluation of approximately 22000 sensors. 8 Types of sensors, 2 barrel and 6 endcap, will be measured at many different collaborating institutes. The sustained throughput requirement of the combined QC processes is around 500 sensors per month in total. Measurement protocols have been established and acceptance criteria have been defined in accordance with the terms agreed with the supplier. For effective monitoring of test results, common data file formats have been agreed upon across the collaboration. To enable evaluation of test results produced by many different test setups at the various collaboration institutes, common algorithms have been developed to collate, evaluate, plot and upload measurement data. This allows for objective application of pass/fail criteria and compilation of corresponding yield data. These scripts have been used to process the data of more than 3000 sensors so far, and have been instrumental for identification of faulty sensors and monitoring of QC testing progress.
Initial tests of large format sensors for the ATLAS ITk strip tracker Klein, C.T.; Hommels, L.B.A.; Fadeyev, V. ...
Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment,
01/2021, Letnik:
986, Številka:
C
Journal Article
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For the construction of the Inner Tracker (ITk) as part of the phase-II upgrade programme of the ATLAS detector for the High-Luminosity (HL) LHC, batches of Long Strip (LS) and Short Strip (SS) ...n+-in-p type micro-strip sensors have been produced by Hamamatsu Photonics and Infineon.
The full size sensors measure approximately 98 × 98 mm2 and are designed and engineered for tolerance against the 9.7 × 1014 1 MeV neq/cm2 fluence expected at the HL-LHC, including a safety factor of 1.5. Each sensor has 2 or 4 columns of 1280 individual channels arranged at 75.5 μm horizontal pitch.
To ensure the sensors comply with their specifications, a Quality Control (QC) procedure has been implemented, comprising measurements on every individual sensor as well as on a sample basis. Every sensor is subjected to an initial visual inspection, after which the full surface of the sensor is captured with very high resolution by an automated camera setup. Non-contact metrology is performed to obtain the sensor surface profile. Electrical measurements establishing the reverse bias leakage current and depletion voltage are then conducted automatically. Sample sensors from every batch are subjected to 40 h of leakage stability checks in controlled atmosphere, and tests on every channel measuring leakage current, coupling capacitance and bias resistance are done. The recorded results are uploaded to a production database following data quality checks.
In this paper, QC test validation data and the compiled results for the first batches of production grade sensors are presented. The QC protocol was validated, and the first production sensors were confirmed to be within specification. The results are compared to those from the previous generation of prototype sensors.
Humidity sensitivity of large area silicon sensors: Study and implications Fernández-Tejero, J.; Allport, P.P.; Aviñó, O. ...
Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment,
10/2020, Letnik:
978, Številka:
C
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The production of large area sensors is one of the main challenges that the ATLAS collaboration faces for the new Inner-Tracker full-silicon detector. During the prototype fabrication phase for the ...High Luminosity Large Hadron Collider upgrade, several ATLAS institutes observed indications of humidity sensitivity of large area sensors, even at relative humidities well below the dew point. Specifically, prototype Barrel and End-Cap silicon strip sensors fabricated in 6-inch wafers manifest a prompt decrease of the breakdown voltage when operating under high relative humidity, adversely affecting the performance of the sensors. In addition to the investigation of these prototype sensors, a specific fabrication batch with special passivation is also studied, allowing for a deeper understanding of the responsible mechanisms.
This work presents an extensive study of this behaviour on large area sensors. The locations of the hotspots at the breakdown voltage at high humidity are revealed using different infrared thermography techniques. Several palliative treatments are attempted, proving the influence of sensor cleaning methods, as well as baking, on the device performance, but no improvement on the humidity sensitivity was achieved. Furthermore, a study of the incidence of the sensitivity in different batches is also presented, introducing a hypothesis of the origins of the humidity sensitivity associated to the sensor edge design, together with passivation thickness and conformity. Several actions to be taken during sensor production and assembly are extracted from this study, in order to minimize the impact of humidity sensitivity on the performance of large area silicon sensors for High Energy Physics experiments.
The high luminosity upgrade of the Large Hadron Collider, foreseen for 2027, requires the replacement of the ATLAS Inner Detector with a new all-silicon Inner Tracker (ITk). The expected total ...integrated luminosity of 4000 fb−1 means that the strip part of the ITk detector will be exposed to a large radiation fluence of up to Φeq = 1.6 × 1015 1 MeV neq/cm and an ionizing dose of 0.66 MGy, including a safety factor of 1.5. Radiation-hard n+-in-p micro-strip sensors for use in the ITk have been developed by the ATLAS ITk Strip Sensor collaboration and produced by Hamamatsu Photonics K.K. In this paper, the results obtained from the electrical characterization of the latest barrel ATLAS17LS sensor prototype, before and after irradiation, are shown.
Surface properties of the long-strip barrel, full-sized and miniature sensors have been studied before and after proton, neutron and gamma irradiation up to the maximal fluences and radiation doses specified for the ITk Strip tracker. Sensors have been irradiated by protons at CYRIC, Tohoku University (Japan), the Proton Irradiation Facility at CERN, Karlsruhe Inst. Tech. (Germany) and at the University of Birmingham (UK), by neutrons from the Ljubljana TRIGA reactor (Slovenia) and by gamma rays from the 60Co source in UJP Praha (Czech Republic).
It has been verified that the surface radiation damage does not influence the sensor functionality. The breakdown voltage is well above the maximum operational voltage. All the tested surface parameters, such as the inter-strip resistance and capacitance, coupling capacitance and bias resistance satisfy the ATLAS ITk specifications for strip sensors.
The inner tracker of the ATLAS detector is scheduled to be replaced by a completely new silicon-based inner tracker (ITk) for the Phase-II of the CERN LHC (HL-LHC). The silicon strip detector covers ...the volume 40<R<100 cm in the radial and |z|<300 cm in the longitudinal directions. The silicon sensors for the detector will be fabricated using the n+-on-p 6-inch wafer technology, for a total of 22,000 wafers. Intensive studies were carried out on the final prototype sensors ATLAS17LS fabricated by Hamamatsu Photonics (HPK). The charge collection properties were examined using penetrating 90Sr β-rays and the ALIBAVA fast readout system for the miniature sensors of 1 cm ×1 cm in area. The samples were irradiated by protons in the 27 MeV Birmingham Cyclotron, the 70 MeV CYRIC at Tohoku University, and the 24 GeV CERN-PS, and by neutrons at Ljubljana TRIGA reactor for fluence values up to 2 × 1015 neq/cm2. The change in the charge collection with fluence was found to be similar to the previous prototype ATLAS12, and acceptable for the ITk. Sensors with two active thicknesses, 300μm (standard) and 240μm (thin), were compared and the difference in the charge collection was observed to be small for bias voltages up to 500 V. Some samples were also irradiated with gamma radiation up to 2 MGy, and the full depletion voltage was found to decrease with the dose. This was caused by the Compton electrons due to the 60Co gamma radiation. To summarize, the design of the ATLAS17LS and technology for its fabrication have been verified for implementation in the ITk. We are in the stage of sensor pre-production with the first sensors already delivered in January of 2020.
The high luminosity upgrade of the Large Hadron Collider, foreseen for 2029, requires the replacement of the ATLAS Inner Detector with a new all-silicon Inner Tracker (ITk). The expected ultimate ...total integrated luminosity of 4000 fb−1 means that the strip part of the ITk detector will be exposed to the total particle fluences and ionizing doses reaching the values of 1.6⋅1015MeVneq/cm2 and 0.66MGy, respectively, including a safety factor of 1.5. Radiation hard n+-in-p micro-strip sensors were developed by the ATLAS ITk strip collaboration and are produced by Hamamatsu Photonics K.K. The active area of each ITk strip sensor is delimited by the n-implant bias ring, which is connected to each individual n+ implant strip by a polysilicon bias resistor. The total resistance of the polysilicon bias resistor should be within a specified range to keep all the strips at the same potential, prevent the signal discharge through the grounded bias ring and avoid the readout noise increase. While the polysilicon is a ubiquitous semiconductor material, the fluence and temperature dependence of its resistance is not easily predictable, especially for the tracking detector with the operational temperature significantly below the values typical for commercial microelectronics.
Dependence of the resistance of polysilicon bias resistor on the temperature, as well as on the total delivered fluence and ionizing dose, was studied on the specially-designed test structures called ATLAS Testchips, both before and after their irradiation by protons, neutrons, and gammas to the maximal expected fluence and ionizing dose. The resistance has an atypical negative temperature dependence. It is different from silicon, which shows that the grain boundary has a significant contribution to the resistance. We discuss the contributions by parameterizing the activation energy of the polysilicon resistance as a function of the temperature for unirradiated and irradiated ATLAS Testchips.
The ATLAS experiment will replace its existing Inner Detector with the new all-silicon Inner Tracker (ITk) to cope with the operating conditions of the forthcoming high-luminosity phase of the LHC ...(HL-LHC). The outer regions of the ITk will be instrumented with ∼18000 ATLAS18 strip sensors fabricated by Hamamatsu Photonics K.K. (HPK). With the launch of full-scale sensor production in 2021, the ITk strip sensor community has undertaken quality control (QC) testing of these sensors to ensure compliance with mechanical and electrical specifications agreed with HPK. The testing is conducted at seven QC sites on each of the monthly deliveries of ∼500 sensors.
This contribution will give an overview of the QC procedures and analysis; the tests most likely to determine pass/fail for a sensor are IV, long-term leakage current stability, full strip test and visual inspection. The contribution will then present trends in the results and properties following completion of ∼60% of production testing. It will also mention challenges overcome through collaborative efforts with HPK during the early phases of production. With less than 5% of sensors rejected by QC testing, the overall production quality has been very good.
Miniature sensors with external dimensions of 10 mm x 10 mm were produced together with full-size sensors for the innermost ring (R0) of the end-cap part in the upgraded ATLAS inner tracker (ITk). ...AC- and DC-coupled n-type strips with three different pitches (wide, default and narrow) were processed on high-resistivity p-type FZ silicon substrates by Hamamatsu Photonics. The miniature sensors were irradiated with 70-MeV protons at CYRIC, Tohoku University (Japan) and reactor neutrons at the Jožef Stefan Institute (Slovenia) to three different 1-MeV neutron equivalent fluences: 0.5, 1 and 2 x 1015neqcm−2. The upper fluence range exceeds the highest anticipated in the innermost part of the ATLAS ITk-Strips over the HL-LHC lifetime (∼1.25 × 1015neqcm2). The charge collection in the test sensors was evaluated systematically using a 90Sr β-source and an Alibava analogue readout system at reverse-bias voltages up to 1000 V.
•The charge collection in the test sensors was evaluated systematically.•The collected charge increases with the applied voltage.•At higher voltages the effect of multiplication can be seen.•The multiplication becomes higher at long annealing times.
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