Protective surface layers on AISI 321 stainless steel were prepared by thermal treatments at two different temperatures in air and two controlled atmospheres. Different oxide and/or nitride layers were formed. Surface morphology of the layers was investigated by scanning electron microscopy (SEM). Auger electron spectroscopy (AES) depth profiling of the samples was performed. Since depth profiling suggested layer thicknesses of the order of hundreds of nanometres, an attempt was made to obtain some fast, averaged information about the layer compositions using wavelength dispersive spectroscopy (WDS) at two different beam energies to obtain probing depths best suited to the layer thickness. X‐ray photoelectron spectroscopy (XPS) profiling of one layer was also performed to obtain information about the chemical states of the elements inside the layer. The analysed samples showed considerable differences with respect to their surface morphology, oxide/nitride layer thicknesses, compositions and layer–metal interface thickness. Copyright © 2007 John Wiley & Sons, Ltd.