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Hsu, Yu-Hsuan; Wan, Tsung-Chih; Lo, Yu-Yun; Lin, Xin-Dai; Lin, Yi-Hsin; Zan, Hsiao-Wen; Horng, Ray-Hua
IEEE electron device letters, 02/2024, Letnik: 45, Številka: 2Journal Article
In this study, thin-film blue-light micro-light-emitting diodes (μLEDs) were successfully fabricated by laser lift-off technique, which had an emission region of only 10 μm × 10 μm. Additionally, a texturing treatment was applied to the top undoped GaN surface. The texturing time was optimized to prevent a total reflective effect and further enhance the light extraction efficiency. As a result, the emission output power (@ 30 mA) and EQE max of the μLED textured for 2 minutes exhibited 1.35 times and 1.64 times higher values as compared with those of μLED with a sapphire substrate, respectively.
