We applied ozone source apportionment technology (OSAT) with tagged tracers coupled within the Comprehensive Air Quality Model with Extensions (CAMx) to study the region and source category contribution to surface ozone in the Yangtze River Delta area in summer of 2013. Results indicate that the daytime ozone concentrations in the YRD region are influenced by emissions both locally, regionally and super-regionally. At urban Shanghai, Hangzhou and Suzhou receptors, the ozone formation is mainly VOC-limited, precursor emissions form Zhejiang province dominate their O3 concentrations. At the junction area among two provinces and Shanghai city, the ozone is usually influenced by all the three areas. The daily max O3 at the Dianshan Lake in July are contributed by Zhejiang (48.5%), Jiangsu (11.7%), Anhui (11.6%) and Shanghai (7.4%), long-range transport constitutes around 20.9%. At Chongming site, the BVOC emissions rate is higher than urban region. Regional contribution results show that Shanghai constitutes 15.6%, Jiangsu contributes 16.2% and Zhejiang accounts for 25.5% of the daily max O3. The analysis of the source category contribution to high ozone in the Yangtze River Delta region indicates that the most significant anthropogenic emission source sectors contributing to O3 pollution include industry, vehicle exhaust, although the effects vary with source sector and selected pollution episodes. Emissions of NOx and VOCs emitted from the fuel combustion of industrial boilers and kilns, together with VOCs emissions from industrial process contribute a lot to the high concentrations in urban Hangzhou, Suzhou and Shanghai. The contribution from regional elevated power plants cannot be neglected, especially to Dianshan Lake. Fugitive emissions of volatile pollution sources also have certain contribution to regional O3. These results indicate that the regional collaboration is of most importance to reduce ambient ozone pollution, particularly during high ozone episodes. •A high O3 episode over the YRD was simulated using the CAMx modeling system.•Ozone source apportionment technology was applied to study the formation mechanism and sources of O3.•Contributions of different source regions and source categories to O3 were analyzed.