DIKUL - logo
E-viri
Celotno besedilo
Recenzirano Odprti dostop
  • Buried Layer Low Gain Avala...
    Apresyan, A.; Giacomini, G.; Heller, R.; Mannelli, M.; Islam, R.; Lipton, Ronald; Tricoli, A.; Chen, W.

    Journal of physics. Conference series, 11/2022, Letnik: 2374, Številka: 1
    Journal Article

    We report on the design, simulation and test of Low Gain Avalanche Diodes (LGADs) which utilize a buried gain layer. The buried layer is formed by patterned implantation of a 50-micron thick float zone substrate wafer-bonded to a low resistivity carrier. This is then followed by epitaxial deposition of a ≈ 3 micron-thick high resistivity amplification region. The topside is then processed with junction edge termination and guard ring structures and incorporates an AC-coupled cathode implant. This design allows for independent adjustment of gain layer depth and density, increasing design flexibility. A higher gain layer dopant density can also be achieved by controlling the process thermal budget, improving radiation hardness. A first set of demonstration devices has been fabricated, including a variety of test structures. We report on TCAD design and simulation, fabrication process flow, and preliminary measurements of prototype devices.