Organische Gasphasendeposition (OVPD) ist eine neue Wachstumstechnik, die für das Aufwachsen von dünnen Schichten auf großen Substratoberflächen bestens geeignet ist. Die polarisationsempfindlichen ...Messmethoden Ellipsometrie und Reflektionsanisotropie‐Spektroskopie (RAS), haben ein großes Potenzial zur Wachstumskontrolle im OVPD‐Prozess. Die Ellipsometrie ist sehr leistungsfähig, um die Dicke und die optischen Konstanten für OVPD‐Schichten zu bestimmen. Dies wurde für eine Alq3‐Schicht gezeigt. RAS ist eine ausgezeichnete Methode für die Detektion von sehr dünnen organischen Schichten, wie anhand einer PTCDA‐Schicht erläutert wird.
Organic Vapor Phase Deposition (OVPD) is a new thin film growth technique which is very suitable for deposition of uniform thin films on larger substrate areas. The polarization sensitive methods, ellipsometry and Reflectance Anisotropy Spectroscopy (RAS), have huge potential for the control of the growth in the OVPD process. The capability of ellipsometry to determine the thickness and the optical constants of OVPD deposited films was demonstrated using as example an Alq3 film. RAS showed high potential for the detection of very thin organic anisotropic films, as exemplified for an PTCDA film.
A range of mesoporous xerogel low-k dielectric films were prepared and characterised using complementary techniques: Laser-generated surface acoustic waves, ellipsometric porosimetry, Rutherford ...backscattering and nanoindentation. The density, porosity, pore size distribution, cumulative surface area, elastic modulus and hardness of the films were measured as well as their dielectric constants. Dielectric constant values of k = 1.7-2.3 were measured for samples with porosities of 36-55%. Mean pore radii values of 2.2-4.2 nm and surface areas of 280-240 m super(3) cm super(-3) were also obtained. Using porosity and mean film density values determined using different techniques, the film skeletal density of these samples were calculated to be approximately 1.4 g cm super(-3), almost 40% lower than that of dense SiO sub(2). The elastic moduli of the films were found to be E < 4 GPa. copyright 2002 Elsevier Science B.V. All rights reserved.
We are discussing the latest results in the field of Organic Vapor Phase Deposition (OVPD) on basis of our experimental data. In particular the use of carrier gas and its controlled mass flow are ...adding an additional parameter to control deposition rates in OLED manufacturing by OVPD. Many advantages offered by this key parameter in this technology like stable deposition rates, wide range of adjustable deposition rates and doping concentrations are discussed.
A small molecule hybrid OLED (SM‐HLED) consisting of a polymer layer of PEDT:PSS and two small molecule layers of α‐NPD and Alq3 was fabricated by OVPD. For this 3‐layer device we observed a turn on voltage of 2.5 V, a luminance brightness of 100 cd/m2 at 5.2 V and 300 cd/m2 at 6.5 V. Furthermore a passive matrix OLED‐display (PMOLED‐display) was demonstrated by OVPD. The display had a turn‐on voltage of about 3.0 V and showed a very homogeneous light emission.
These device characteristics confirm that OVPD is close to be comparable to Vacuum Thermal Evaporation (VTE).
