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  • Excimer Laser Microstructur... Excimer Laser Microstructuring of Amorphous Silicon Films for Electron Field Emission Applications
    Fan, Y.; Rose, M.J.; Persheyev, S.K. ... 2009 Symposium on Photonics and Optoelectronics, 2009-Aug.
    Conference Proceeding

    The hydrogenated amorphous silicon (a-Si:H) Alms on molybdenum coated glass substrates were microstructured by irradiating the films using KrF excimer laser with a slope beam profile. By varying the ...
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